Prof. Puurunen invited tutorial at ALD for Industry Berlin 2019

On March 19, 2019, I gave an invited tutorial at the ALD for Industry event by … In an Open Teaching atmosphere, I created a Panopto record of the talk and the talk is shared openly.

The publication of the slides in SlideShare & video in Youtube waited for the publication of the review article: Conformality in atomic layer deposition: Current status overview of analysis and modelling, by Cremers, Puurunen & Dendooven, Applied Physics Reviews 6, 021302 (2019); https://doi.org/10.1063/1.5060967.

Update notes:

  • Links to SlideShare & Youtube updated 6.4.2019
  • Link to Applied Physics Reviews article updated 8.4.2019

Posted by Riikka Puurunen

About Riikka Puurunen

Associate professor, Catalysis Science and Technology, at Aalto since February 2017
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