On March 19, 2019, I gave an invited tutorial at the ALD for Industry event by … In an Open Teaching atmosphere, I created a Panopto record of the talk and the talk is shared openly.
- Panopto record: https://aalto.cloud.panopto.eu/Panopto/Pages/Viewer.aspx?id=e05d5cde-6e6c-4893-807d-aa150110c0e3
- Slides in SlideShare: https://www.slideshare.net/RiikkaPuurunen/ald-for-industry-2019-slides-of-invited-tutorial-by-prof-riikka-puurunen
- Youtube: https://youtu.be/6zCvaMv58hY
The publication of the slides in SlideShare & video in Youtube waited for the publication of the review article: Conformality in atomic layer deposition: Current status overview of analysis and modelling, by Cremers, Puurunen & Dendooven, Applied Physics Reviews 6, 021302 (2019); https://doi.org/10.1063/1.5060967.
Update notes:
- Links to SlideShare & Youtube updated 6.4.2019
- Link to Applied Physics Reviews article updated 8.4.2019
