Lecture by Prof. Riikka Puurunen at Aalto University course CHEM-E5175 Materials engineering by thin films (by Prof. Ville Miikkulainen), in a visiting lecture Jan 28, 2025
Contents:
1 Invention of Atomic Layer Epitaxy 1974
2 Microchemistry Ltd and spread of ALE/ALD
3 Independent invention, Molecular Layering 1960s –>
4 Connecting the two independent development branches of ALD
5 Take-home message
(Extra materials on fundamentals of ALD, assumed as background knowledge)
Links:
SlideShare: https://www.slideshare.net/slideshow/history-of-atomic-layer-deposition-ald-in-a-nutshell/275984811
Youtube: https://youtu.be/FBLThDjRff0
Panopto: https://aalto.cloud.panopto.eu/Panopto/Pages/Viewer.aspx?id=ce1ed0b4-93a2-47ab-b76c-b27300b6c10a
