Invited tutorial at the ALDfun(amentals…) workshop, TU Delft

This summer, I was visiting TU Delft for a period of five weeks, invited by Prof. Ruud van Ommen. Interesting, buzy weeks – also because of the #CVDALD2019 conference, where we had posters (on ALD conformality and ALD history). Thanks for the invitation & opportunity!

One of the activities during my visit was: Workshop on Fundamentals of Atomic Layer Deposition: Modelling and Validation, July 3rd 2019, TU Delft, The Netherlands (link), organized by Dr. Fatemeh Hashemi and Prof. Ruud van Ommen. I had the honor to give the first invited tutorial-type talk, “Surface coverage in ALD”. Among the points which I wished to convey with the talk was that “(surface) coverage” may mean highly different things to different people and if the usage is not defined well in each case, it may create confusion. My presentation is accessible:

There was quite some tweeting activity during the event, with the Twitter hashtag #ALDfun. Here, one picture, from the post:

Posted by Riikka Puurunen

About Riikka Puurunen

Associate professor, Catalysis Science and Technology, at Aalto since February 2017
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