{"id":787,"date":"2025-02-24T12:21:24","date_gmt":"2025-02-24T12:21:24","guid":{"rendered":"https:\/\/blogs.aalto.fi\/catprofopen\/?p=787"},"modified":"2025-02-24T12:21:25","modified_gmt":"2025-02-24T12:21:25","slug":"history-of-atomic-layer-deposition-ald-in-a-nutshell-slides-and-lecture-capture-published","status":"publish","type":"post","link":"https:\/\/blogs.aalto.fi\/catprofopen\/2025\/02\/24\/history-of-atomic-layer-deposition-ald-in-a-nutshell-slides-and-lecture-capture-published\/","title":{"rendered":"History of atomic layer deposition (ALD) in a nutshell &#8211; slides and lecture capture published"},"content":{"rendered":"\n<p>Lecture by Prof. Riikka Puurunen at Aalto University course CHEM-E5175 Materials engineering by thin films (by Prof. Ville Miikkulainen), in a visiting lecture Jan 28, 2025<br>Contents: <br>1 Invention of Atomic Layer Epitaxy 1974<br>2 Microchemistry Ltd and spread of ALE\/ALD<br>3 Independent invention, Molecular Layering 1960s &#8211;&gt; <br>4 Connecting the two independent development branches of ALD<br>5 Take-home message<br>(Extra materials on fundamentals of ALD, assumed as background knowledge)<br><br>Links:<br>SlideShare: <a href=\"https:\/\/www.slideshare.net\/slideshow\/history-of-atomic-layer-deposition-ald-in-a-nutshell\/275984811\">https:\/\/www.slideshare.net\/slideshow\/history-of-atomic-layer-deposition-ald-in-a-nutshell\/275984811<\/a> <br>Youtube: <a href=\"https:\/\/youtu.be\/FBLThDjRff0\">https:\/\/youtu.be\/FBLThDjRff0<\/a> <br>Panopto: <a href=\"https:\/\/aalto.cloud.panopto.eu\/Panopto\/Pages\/Viewer.aspx?id=ce1ed0b4-93a2-47ab-b76c-b27300b6c10a\">https:\/\/aalto.cloud.panopto.eu\/Panopto\/Pages\/Viewer.aspx?id=ce1ed0b4-93a2-47ab-b76c-b27300b6c10a<\/a><\/p>\n\n\n\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1140\" height=\"640\" src=\"https:\/\/blogs.aalto.fi\/catprofopen\/files\/2025\/02\/ALD-in-a-nutshell-lecture-Puurunen-1140x640.png\" alt=\"\" class=\"wp-image-790\" srcset=\"https:\/\/blogs.aalto.fi\/catprofopen\/files\/2025\/02\/ALD-in-a-nutshell-lecture-Puurunen-1140x640.png 1140w, https:\/\/blogs.aalto.fi\/catprofopen\/files\/2025\/02\/ALD-in-a-nutshell-lecture-Puurunen-788x442.png 788w, https:\/\/blogs.aalto.fi\/catprofopen\/files\/2025\/02\/ALD-in-a-nutshell-lecture-Puurunen-768x431.png 768w, https:\/\/blogs.aalto.fi\/catprofopen\/files\/2025\/02\/ALD-in-a-nutshell-lecture-Puurunen-1536x862.png 1536w, https:\/\/blogs.aalto.fi\/catprofopen\/files\/2025\/02\/ALD-in-a-nutshell-lecture-Puurunen.png 1623w\" sizes=\"auto, (max-width: 1140px) 100vw, 1140px\" \/><\/figure>\n<p><span class=\"author vcard\">Posted by Riikka Puurunen<\/span><\/p>","protected":false},"excerpt":{"rendered":"<p>Lecture by Prof. Riikka Puurunen at Aalto University course CHEM-E5175 Materials engineering by thin films (by Prof. Ville Miikkulainen), in a visiting lecture Jan 28, 2025Contents: 1 Invention of Atomic Layer Epitaxy 19742 Microchemistry Ltd and spread of ALE\/ALD3 Independent &hellip; <a href=\"https:\/\/blogs.aalto.fi\/catprofopen\/2025\/02\/24\/history-of-atomic-layer-deposition-ald-in-a-nutshell-slides-and-lecture-capture-published\/\">Continue reading <span class=\"meta-nav\">&rarr;<\/span><\/a><\/p>\n","protected":false},"author":3045,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[79,10],"tags":[38,40,44],"class_list":["post-787","post","type-post","status-publish","format-standard","hentry","category-atomic-layer-deposition","category-openness","tag-atomic-layer-deposition","tag-open-teaching","tag-virtual-project-on-the-history-of-ald"],"_links":{"self":[{"href":"https:\/\/blogs.aalto.fi\/catprofopen\/wp-json\/wp\/v2\/posts\/787","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/blogs.aalto.fi\/catprofopen\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/blogs.aalto.fi\/catprofopen\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/blogs.aalto.fi\/catprofopen\/wp-json\/wp\/v2\/users\/3045"}],"replies":[{"embeddable":true,"href":"https:\/\/blogs.aalto.fi\/catprofopen\/wp-json\/wp\/v2\/comments?post=787"}],"version-history":[{"count":3,"href":"https:\/\/blogs.aalto.fi\/catprofopen\/wp-json\/wp\/v2\/posts\/787\/revisions"}],"predecessor-version":[{"id":792,"href":"https:\/\/blogs.aalto.fi\/catprofopen\/wp-json\/wp\/v2\/posts\/787\/revisions\/792"}],"wp:attachment":[{"href":"https:\/\/blogs.aalto.fi\/catprofopen\/wp-json\/wp\/v2\/media?parent=787"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/blogs.aalto.fi\/catprofopen\/wp-json\/wp\/v2\/categories?post=787"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/blogs.aalto.fi\/catprofopen\/wp-json\/wp\/v2\/tags?post=787"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}