{"id":525,"date":"2020-10-17T09:07:29","date_gmt":"2020-10-17T09:07:29","guid":{"rendered":"https:\/\/blogs.aalto.fi\/catprofopen\/?p=525"},"modified":"2020-10-17T09:19:57","modified_gmt":"2020-10-17T09:19:57","slug":"history-of-ald-ald-stories-podcast-with-riikka-puurunen-by-beneq","status":"publish","type":"post","link":"https:\/\/blogs.aalto.fi\/catprofopen\/2020\/10\/17\/history-of-ald-ald-stories-podcast-with-riikka-puurunen-by-beneq\/","title":{"rendered":"History of ALD &#8211; ALD stories podcast Episode 2 with Riikka Puurunen"},"content":{"rendered":"<p>On October 16, 2020, <a href=\"https:\/\/beneq.com\/en\/podcast\/\">ALD stories<\/a> podcast <a href=\"https:\/\/open.spotify.com\/episode\/7zUwL7RrMsx91qd7ZRZaBg?si=Yf1-g6sqQZ-cOyF_Zk3y0Q\">Episode 2<\/a> was published, where I (Riikka Puurunen) had an honor of being interviewed by Lie Luo and Patrick Gonzalez of\u00a0<a href=\"https:\/\/beneq.com\/en\/\">Beneq<\/a>.<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-medium wp-image-528\" src=\"http:\/\/blogs.aalto.fi\/catprofopen\/files\/2020\/10\/Screenshot-2020-10-17-at-12.05.07-788x176.png\" alt=\"\" width=\"788\" height=\"176\" srcset=\"https:\/\/blogs.aalto.fi\/catprofopen\/files\/2020\/10\/Screenshot-2020-10-17-at-12.05.07-788x176.png 788w, https:\/\/blogs.aalto.fi\/catprofopen\/files\/2020\/10\/Screenshot-2020-10-17-at-12.05.07-768x172.png 768w, https:\/\/blogs.aalto.fi\/catprofopen\/files\/2020\/10\/Screenshot-2020-10-17-at-12.05.07-1140x255.png 1140w, https:\/\/blogs.aalto.fi\/catprofopen\/files\/2020\/10\/Screenshot-2020-10-17-at-12.05.07.png 1340w\" sizes=\"auto, (max-width: 788px) 100vw, 788px\" \/><\/p>\n<p>Episode 2 is about the history of <a href=\"https:\/\/en.wikipedia.org\/wiki\/Atomic_layer_deposition\">atomic layer deposition<\/a> (ALD), but also other things dear to my heart. Mentioned are for example: conformality; catalysis; 40 Years of ALD in Finland &#8211; Photos, Stories (FinALD40 exhibition); Baltic ALD 2014 conference; story of Suntola&#8217;s atomic layer epitaxy; two almost parallel inventions of ALD; Beneq applab opening in St. Petersburg 2013; molecular layering; 1st international conference on atomic layer epitaxy 1990; international ALD conference; November Networking &#8211; ALD at Aalto University; Millennium Technology Prize; Virtual Project on the History of ALD; ALD window; misconception of full monolayer growth per cycle for ideal ALD; conformality test concept &amp; saturation profile &amp; lumped sticking coefficient.<\/p>\n<p>Persons mentioned, at least: Outi Krause, Suvi Haukka, Tuomo Suntola, Sven Lindfors, Arto Pakkala, Victor Drozd, Valentin Aleskovskii, Angel Yanguas-Gil, Jonas Sundqvist.<\/p>\n<p>Companies mentioned, at least: Microchemistry, Neste, Beneq, Lohja, Picosun.<\/p>\n<p>The podcast is available in at least via:<\/p>\n<ul>\n<li>the Beneq website:\u00a0<a href=\"https:\/\/beneq.com\/en\/podcast\/\">https:\/\/beneq.com\/en\/podcast\/<\/a><\/li>\n<li>Spotify. Full podcast:\u00a0<a href=\"https:\/\/open.spotify.com\/show\/51i69jeWEb8BhmkbJ135Um\">https:\/\/open.spotify.com\/show\/51i69jeWEb8BhmkbJ135Um<\/a>, Episode 2:\u00a0<a href=\"https:\/\/open.spotify.com\/episode\/7zUwL7RrMsx91qd7ZRZaBg?si=Yf1-g6sqQZ-cOyF_Zk3y0Q\">https:\/\/open.spotify.com\/episode\/7zUwL7RrMsx91qd7ZRZaBg?si=Yf1-g6sqQZ-cOyF_Zk3y0Q<\/a><\/li>\n<\/ul>\n<p><!--more-->Reviews in Applied Physics Reviews mentioned:<\/p>\n<ul>\n<li>Surface chemistry: R. L. Puurunen,\n<div class=\"publicationContentCitation\">Journal of Applied Physics\u00a0<b>97<\/b>, 121301 (2005);\u00a0<a href=\"https:\/\/doi.org\/10.1063\/1.1940727\">https:\/\/doi.org\/10.1063\/1.1940727<\/a><\/div>\n<\/li>\n<li>Crystallinity: V. Miikkulainen, M. Leskel\u00e4, M. Ritala, R. L. Puurunen,\u00a0Journal of Applied Physics\u00a0<b>113<\/b>, 021301 (2013);\u00a0<a href=\"https:\/\/doi.org\/10.1063\/1.4757907\">https:\/\/doi.org\/10.1063\/1.4757907<\/a><\/li>\n<li>Conformality of ALD: V. Cremers, R. L. Puurunen, J. Dendooven, Applied Physics Reviews\u00a0<b>6<\/b>, 021302 (2019);\u00a0<a href=\"https:\/\/doi.org\/10.1063\/1.5060967\">https:\/\/doi.org\/10.1063\/1.5060967<\/a><\/li>\n<\/ul>\n<p>Essays mentioned on the history of ALD:<\/p>\n<ul>\n<li>ALE essay: R. L. Puurunen, &#8220;A short history of atomic layer deposition: Tuomo Suntola&#8217;s atomic layer epitaxy,&#8221; Chemical Vapor Deposition 20 (2014) 332-344;\u00a0<a href=\"https:\/\/doi.org\/10.1002\/cvde.201402012\">https:\/\/doi.org\/10.1002\/cvde.201402012<\/a><\/li>\n<li>ML essay: A. A. Malygin,\u00a0 V. E. Drozd, A. A. Malkov, V. M. Smirnov, &#8220;From V. B. Aleskovskii&#8217;s &#8220;framework&#8221; hypothesis to the method of molecular layering\/atomic layer deposition,&#8221; Chemical Vapor Deposition 21 (2015) 216-240;\u00a0<a href=\"https:\/\/doi.org\/10.1002\/cvde.201502013\">https:\/\/doi.org\/10.1002\/cvde.201502013<\/a><\/li>\n<\/ul>\n<p>Also mentioned, just published paper on conformality analysis:<\/p>\n<ul>\n<li>J. Yim, O. M. E. Ylivaara, M. Ylilammi, V. Korpelainen, E. Haimi, E. Verkama, M. Utriainen, R. L. Puurunen, &#8220;Saturation profile based conformality analysis for atomic layer deposition: aluminum oxide in lateral high-aspect-ratio channels,&#8221; Physical Chemistry Chemical Physics, 2020, advance article,\u00a0<a href=\"https:\/\/doi.org\/10.1039\/D0CP03358H\">https:\/\/doi.org\/10.1039\/D0CP03358H<\/a><\/li>\n<\/ul>\n<p>Forgotten to mention: the Aalto OpenLearning site being built around ALD in international collaboration:\u00a0<a href=\"https:\/\/openlearning.aalto.fi\/course\/view.php?id=100\">https:\/\/openlearning.aalto.fi\/course\/view.php?id=100<\/a>. Maybe once, the ALD Stories podcast Episode 2 will also be linked to this OpenLearning site.<\/p>\n<p>&nbsp;<\/p>\n<p><span class=\"author vcard\">Posted by Riikka Puurunen<\/span><\/p>\n","protected":false},"excerpt":{"rendered":"<p>On October 16, 2020, ALD stories podcast Episode 2 was published, where I (Riikka Puurunen) had an honor of being interviewed by Lie Luo and Patrick Gonzalez of\u00a0Beneq. Episode 2 is about the history of atomic layer deposition (ALD), but &hellip; <a href=\"https:\/\/blogs.aalto.fi\/catprofopen\/2020\/10\/17\/history-of-ald-ald-stories-podcast-with-riikka-puurunen-by-beneq\/\">Continue reading <span class=\"meta-nav\">&rarr;<\/span><\/a><\/p>\n","protected":false},"author":3045,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[79,10],"tags":[85,38,72,40,44],"class_list":["post-525","post","type-post","status-publish","format-standard","hentry","category-atomic-layer-deposition","category-openness","tag-ald-stories-podcast","tag-atomic-layer-deposition","tag-november-networking-ald","tag-open-teaching","tag-virtual-project-on-the-history-of-ald"],"_links":{"self":[{"href":"https:\/\/blogs.aalto.fi\/catprofopen\/wp-json\/wp\/v2\/posts\/525","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/blogs.aalto.fi\/catprofopen\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/blogs.aalto.fi\/catprofopen\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/blogs.aalto.fi\/catprofopen\/wp-json\/wp\/v2\/users\/3045"}],"replies":[{"embeddable":true,"href":"https:\/\/blogs.aalto.fi\/catprofopen\/wp-json\/wp\/v2\/comments?post=525"}],"version-history":[{"count":7,"href":"https:\/\/blogs.aalto.fi\/catprofopen\/wp-json\/wp\/v2\/posts\/525\/revisions"}],"predecessor-version":[{"id":533,"href":"https:\/\/blogs.aalto.fi\/catprofopen\/wp-json\/wp\/v2\/posts\/525\/revisions\/533"}],"wp:attachment":[{"href":"https:\/\/blogs.aalto.fi\/catprofopen\/wp-json\/wp\/v2\/media?parent=525"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/blogs.aalto.fi\/catprofopen\/wp-json\/wp\/v2\/categories?post=525"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/blogs.aalto.fi\/catprofopen\/wp-json\/wp\/v2\/tags?post=525"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}